| Elec Control Rack |
Size : 1,360*1,000*250mm
Temp Controller, PLC, MC, CP, SCR, ELCB, Etc.
EMO Switch, System On/Off Switch, Signal Tower |
| Load Lock Unit |
Load Lock Material : Al6061(Soft Anodizing)
Stroker : 400mm
Gate Valve, Slow & Fast Pumping
Convectron Gauge & ATM Switch |
| Gas Utility Unit |
Size : 770*1,000*1,100mm
4 Bubbler Canisters with 150℃
1 Reactant Canister(H2O)
Process Gas : Ar, N2, O2, H2, O3 ,NH3
Gas Inlet Port
Monitor Arm Set |
| Process Chamber Unit |
Chamber Material : Al6061-T6 (Hard Anodizing)
Showerhead type Toplid
Showerhead Material : Al6061 / Ceramic
Chamber Wall Temp : 200℃ (Cartridge Heater)
Stage Temp : 500℃
Pumping line APC 적용(Throttle valve,Baratron gauge,Controller)
Pumping Line : NW40
Vacuum Gauge: Convectron Gauge, Baratron Gauge , ATM Switch |
| Al Profile Frame Unit |
Size : 1,520*1,000*1900
PC, DC Power Supply, APC Controller Rack
13.56Mhz-600w Matcher & Generator Set
CDA, PCW Inlet Port |
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